Reliability and failure analysis of fine copper wire bonds encapsulated with commercial epoxy molding compound
نویسندگان
چکیده
The small outline transistor (SOT) devices which were interconnected with 20 lm copper bonding wire and encapsulated with commercial epoxy molding compound (EMC) have been used in a series of reliability tests which including the thermal shock test, the electrical service life test, and the isothermal aging test. Isolated IMC spots were found at the bonding interface during the thermal shock test. No void or crack was observed even after 1500 cycles thermal shock test. No electrical failure was happened. The isolated IMC spots also occurred at the Cu/Al bonds interface after 500 h electrical operation. After 1000 h electrical operation, the sizes of the IMC spots were about 0.5 lm. No layered IMC was observed. The IMCs were formed at the bonding interface when the aging temperature was between 150 C and 250 C. Micro cracks and Kirkendall voids were observed with the aging time of 9 days at 200 C and the aging time of 9 h at 250 C. The minor element in the EMC, Sb, has reacted with Cu wire and Cu bond surface at 250 C when the aging time was more than 16 h. Cu3Sb was the main product of the diffusion reaction. With the aging time of more than 49 h, the Cu wire was crashed into pieces and the Cu bond periphery has been severely corroded. 2010 Elsevier Ltd. All rights reserved.
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ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 51 شماره
صفحات -
تاریخ انتشار 2011